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APA Citation
Wang, X., Liu, L., He, P., Qu, X., Zhang, J., Wei, S., Mankelevich, Y. A., & Baklanov, M. R. (2017). study of CoTa alloy as barrier layer for Cu/low-k interconnects. Journal of physics, 50, . http://access.bl.uk/ark:/81055/vdc_100087555780.0x00005d