Cite
MLA Citation
Ki Kim et al.. “Silicon Nitride Deposition for Flexible Organic Electronic Devices by VHF (162 MHz)-PECVD Using a Multi-Tile Push-Pull Plasma Source.” Scientific reports, vol. 7, no. 1, 2017, pp. 1–7. http://access.bl.uk/ark:/81055/vdc_100084802213.0x00001b