Cite
APA Citation
Kim, K., Kim, K., Ji, Y., Park, J., Shin, J., Ellingboe, A., & Yeom, G. (2017). silicon Nitride Deposition for Flexible Organic Electronic Devices by VHF (162 MHz)-PECVD Using a Multi-Tile Push-Pull Plasma Source. Scientific reports, 7(1), 1–7. http://access.bl.uk/ark:/81055/vdc_100084802213.0x00001b