Cite
HARVARD Citation
Kim, K. et al. (2017). Silicon Nitride Deposition for Flexible Organic Electronic Devices by VHF (162 MHz)-PECVD Using a Multi-Tile Push-Pull Plasma Source. Scientific reports. 7 (1), pp. 1-7. [Online].
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Kim, K. et al. (2017). Silicon Nitride Deposition for Flexible Organic Electronic Devices by VHF (162 MHz)-PECVD Using a Multi-Tile Push-Pull Plasma Source. Scientific reports. 7 (1), pp. 1-7. [Online].