Cite
HARVARD Citation
Ben, J. et al. (2018). Defect evolution in AlN templates on PVD-AlN/sapphire substrates by thermal annealing. CrystEngComm. 20 (32), pp. 4623-4629. [Online].
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Ben, J. et al. (2018). Defect evolution in AlN templates on PVD-AlN/sapphire substrates by thermal annealing. CrystEngComm. 20 (32), pp. 4623-4629. [Online].