Cite
MLA Citation
D Dezest et al.. “Wafer-scale fabrication of self-actuated piezoelectric nanoelectromechanical resonators based on lead zirconate titanate (PZT).” Journal of micromechanics and microengineering, vol. 25, n.d., p. . http://access.bl.uk/ark:/81055/vdc_100062220378.0x000039