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HARVARD Citation
Dezest, D. et al. (n.d.). Wafer-scale fabrication of self-actuated piezoelectric nanoelectromechanical resonators based on lead zirconate titanate (PZT). Journal of micromechanics and microengineering. p. . [Online].
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Dezest, D. et al. (n.d.). Wafer-scale fabrication of self-actuated piezoelectric nanoelectromechanical resonators based on lead zirconate titanate (PZT). Journal of micromechanics and microengineering. p. . [Online].