Cite
MLA Citation
M. Rizquez et al.. “Plasma-Reactor Wall Interactions: Bromine-Fluorine Chemistry Duality in an Industrial Dry Etch Process.” MRS proceedings, no. 1803, 2015, p. . http://access.bl.uk/ark:/81055/vdc_100029266679.0x00004f
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M. Rizquez et al.. “Plasma-Reactor Wall Interactions: Bromine-Fluorine Chemistry Duality in an Industrial Dry Etch Process.” MRS proceedings, no. 1803, 2015, p. . http://access.bl.uk/ark:/81055/vdc_100029266679.0x00004f