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APA Citation
Rizquez, M., Roussy, A., Bortoloti, B., Pinaton, J., & Goasduff, Y. (2015). plasma-Reactor Wall Interactions: Bromine-Fluorine Chemistry Duality in an Industrial Dry Etch Process. MRS proceedings, (1803), . http://access.bl.uk/ark:/81055/vdc_100029266679.0x00004f