Cite
MLA Citation
Zhangbing 张冰 Gu 顾 et al.. “A novel compound cleaning solution for benzotriazole removal after copper CMP*Project supported by the Special Project Items No.2 in National Long-Term Technology Development Plan, China (Nos. 2009ZX02308-003, 2014ZX02301003-007)..” Journal of semiconductors, vol. 36, n.d., p. . http://access.bl.uk/ark:/81055/vdc_100028692667.0x00004d