Cite
MLA Citation
Mohammed Belmahi et al.. “Microwave Plasma Process for SiCN:H Thin Films Synthesis with Composition Varying from SiC:H to SiN:H in H2/N2/Ar/Hexamethyldisilazane Gas Mixture.” Plasma processes and polymers, vol. 11, no. 6, n.d., pp. 551–558. http://access.bl.uk/ark:/81055/vdc_100024864277.0x00004c