Cite
APA Citation
Esashi, M. (2021). 3D and circuit integration of MEMS. Weinheim : Wiley-VCH. http://access.bl.uk/ark:/81055/vdc_100117890130.0x000001
This is an interim version of our Electronic Legal Deposit Catalogue-eJournals and eBooks while we continue to recover from a cyber-attack.
Esashi, M. (2021). 3D and circuit integration of MEMS. Weinheim : Wiley-VCH. http://access.bl.uk/ark:/81055/vdc_100117890130.0x000001