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APA Citation
Institution,, B. S. (2020). BS EN IEC 62047-40. Semiconductor devices. Micro-electromechanical devices.. London : British Standards Institution. http://access.bl.uk/ark:/81055/vdc_100105468913.0x000001
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Institution,, B. S. (2020). BS EN IEC 62047-40. Semiconductor devices. Micro-electromechanical devices.. London : British Standards Institution. http://access.bl.uk/ark:/81055/vdc_100105468913.0x000001