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MLA Citation
Unknown. Investigation on SiGe selective epitaxy for source and drain engineering in 22 nm CMOS technology node and beyond. Singapore : Springer, 2020. http://access.bl.uk/ark:/81055/vdc_100089037134.0x000001
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Unknown. Investigation on SiGe selective epitaxy for source and drain engineering in 22 nm CMOS technology node and beyond. Singapore : Springer, 2020. http://access.bl.uk/ark:/81055/vdc_100089037134.0x000001