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MLA Citation
Wolfgang Osten, editor. Optical inspection of microsystems. Boca Raton, FL : CRC Press/Taylor & Francis Group, 2020. http://access.bl.uk/ark:/81055/vdc_100083844233.0x000001
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Wolfgang Osten, editor. Optical inspection of microsystems. Boca Raton, FL : CRC Press/Taylor & Francis Group, 2020. http://access.bl.uk/ark:/81055/vdc_100083844233.0x000001