Optical inspection of microsystems. ([2020])

• Record Type: Book
• Further Information: Note: Edited by Wolfgang Osten.
• Editors: Osten, Wolfgang
• Contents: 1. Image Processing and Computer Vision for MEMS Testing [Markus Hüttel] 2. Surface Features [Xiangqian Jiang] 3. A Metrological Characteristics Approach to Uncertainty in Surface Metrology [Richard Leach, Han Haitjema, and Claudiu Giusca] 4. Image Correlation Techniques for Microsystems Inspection [Dietmar Vogel and Bernd Michel] 5. Light Scattering Techniques for the Inspection of Microcomponents and Structures [Angela Duparré and Sven Schröder] 6. Characterization and Measurement of Microcomponents with the Atomic Force Microscope (AFM) [F. Michael Serry and Joanna Schmit] 7. Optical Profiling Techniques for MEMS Measurement [Klaus Körner, Johann Krauter, Aiko Ruprecht, and Tobias Wiesendanger] 8. Grid and Moiré Methods for Micromeasurements [Anand Asundi, Bing Zhao, and Huimin Xie] 9. Grating (Moiré) Interferometry for In-Plane Displacement and Strain Measurement of Microcomponents [Leszek Salbut and Malgorzata Kujawinska] 10. Interference Microscopy Techniques for Microsystem Characterization [Alain Bosseboeuf, Philippe Coste, and Sylvain Petitgrand] 11. Measuring MEMS in Motion by Laser Doppler Vibrometry [Christian Rembe, Georg Siegmund, Heinrich Steger, and Michael Wörtge] 12. An Interferometric Platform for Static, Quasi-Static, and Dynamic Evaluation of Out-of-Plane Deformations of MEMS and MOEMS [Christophe Gorecki, Michał Józwik, and Patrick Delobelle] 13. Optoelectronic Holography for Testing Electronic Packaging and MEMS [Cosme Furlong] 14. Digital Holography and Its Application in MEMS/MOEMS Inspection [Wolfgang Osten and Pietro Ferraro] 15. Speckle Metrology for Microsystem Inspection [Roland Höfling and Petra Aswendt] 16. Spectroscopic Techniques for MEMS Inspection [Ingrid De Wolf] 17. Sensor Fusion in Multiscale Inspection Systems [Marc Gronle]
• Edition: Second edition
• Publisher Details: Boca Raton, FL : CRC Press/Taylor & Francis Group
• Publication Date: 2020
• Copyright Date: 2020
• Extent: 1 online resource, illustrations
• Subjects: 670.42/5; Microelectromechanical systems -- Inspection; Quality control -- Optical methods; Optical measurements; Industrial microscopy; TECHNOLOGY & ENGINEERING / Industrial Engineering; TECHNOLOGY & ENGINEERING / Industrial Technology; TECHNOLOGY & ENGINEERING / Manufacturing; TECHNOLOGY & ENGINEERING / Technical & Manufacturing Industries & Trades; Electronic books
• Languages: English
• ISBNs: 9780429186738; 0429186738; 9780429547355; 0429547358; 9780429532658; 0429532652; 9781498779500; 1498779506
• Related ISBNs: 9781498779470
• Notes: Note: Includes bibliographical references and index.; Note: Online resource; title from PDF title page (EBSCO, viewed June 25, 2019).
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.