Cite
HARVARD Citation
Gatzen, H. et al. (2015) Micro and nano fabrication : tools and processes. [Online]. Berlin : Springer. Available from: http://access.bl.uk/ark:/81055/vdc_100077953567.0x000001
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Gatzen, H. et al. (2015) Micro and nano fabrication : tools and processes. [Online]. Berlin : Springer. Available from: http://access.bl.uk/ark:/81055/vdc_100077953567.0x000001