Micro and nano fabrication : tools and processes /: tools and processes. (2015)

• Record Type: Book
• Further Information: Note: Hans H. Gatzen, Volker Saile, Jürg Leuthold ; with a foreword and an introduction by Richard S. Muller.
• Authors: Gatzen, Hans-Heinrich; Saile, Volker; Leuthold, Jürg
• Contents: Introduction-MEMS, a Historical Perspective -- Vacuum Technology -- Deposition Technologies -- Etching Technologies -- Doping and Surface Modification -- Lithography -- LIGA -- Nanofabrication by Self-Assembly -- Enabling Technologies I -- Wafer Planarization and Bonding -- Enabling Technologies II -- Contamination Control -- Device Fabrication -- An Example.
• Publisher Details: Berlin : Springer
• Publication Date: 2015
• Copyright Date: 2015
• Extent: 1 online resource (521 pages), illustrations
• Subjects: 620.5; Microelectromechanical systems; Microelectromechanical systems; Engineering & Applied Sciences; Technology - General; Engineering; Nanotechnology and Microengineering; Manufacturing, Machines, Tools; Operating Procedures, Materials Treatment; Electronic books
• Languages: English
• ISBNs: 9783662443958; 3662443953; 3662443945; 9783662443941
• Related ISBNs: 9783662443941
• Notes: Note: Includes bibliographical references and index.; Note: Print version record.
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.