Cite
APA Citation
Zhang, W., Chou, X., Shi, T., Ma, Z., Bao, H., Chen, J., Chen, L., Li, D., & Xue, C. (2016). Measurement technology for micro-nanometer devices. Hoboken, New Jersey : John Wiley & Sons, Inc. http://access.bl.uk/ark:/81055/vdc_100038081455.0x000001