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MLA Citation
Unknown. Analysis and design principles of MEMS devices. Place of publication not identified : Elsevier Science, 2005. http://access.bl.uk/ark:/81055/vdc_100026147970.0x000001
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Unknown. Analysis and design principles of MEMS devices. Place of publication not identified : Elsevier Science, 2005. http://access.bl.uk/ark:/81055/vdc_100026147970.0x000001