Analysis and design principles of MEMS devices. (2005)
- Record Type:
- Book
- Title:
- Analysis and design principles of MEMS devices. (2005)
- Main Title:
- Analysis and design principles of MEMS devices
- Further Information:
- Note: By Minhang Bao.
- Other Names:
- Bao, Min-Hang
- Contents:
- 1. Introduction to MEMS devices -- 2. Mechanics of beam and diaphragm structures -- 3. Air damping -- 4. Electrostatic actuation -- 5. Capacitive sensing and effects of electrical excitation -- 6. Piezoresistive sensing -- Answers to the problems -- Subject index.
- Publisher Details:
- Place of publication not identified : Elsevier Science
- Publication Date:
- 2005
- Extent:
- 1 online resource (328 pages)
- Subjects:
- 621.381
Microelectromechanical systems
Microelectromechanical systems - Languages:
- English
- ISBNs:
- 9780080455624
- Related ISBNs:
- 008045562X
- Access Rights:
- Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
- Access Usage:
- Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.
- View Content:
- Available online (eLD content is only available in our Reading Rooms) ↗
- Physical Locations:
- British Library HMNTS - ELD.DS.32237
- Ingest File:
- 02_047.xml