1. Optical inspection of microsystems. (©2007) Other Names: Osten, Wolfgang Record Type: Book Extent: 1 online resource (503 pages, [8] pages of plates), illustrations (some color) View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Optical inspection of microsystems. ([2020]) Editors: Osten, Wolfgang Record Type: Book Extent: 1 online resource, illustrations View Content: Available online (eLD content is only available in our Reading Rooms) ↗