Optical inspection of microsystems. (©2007)

• Record Type: Book
• Further Information: Note: Edited by Wolfgang Osten.
• Other Names: Osten, Wolfgang
• Contents: Image Processing and Computer Vision for MEMS Testing ; Markus Hüttel ; Introduction; Classification of Tasks; Image Processing and Computer Vision Components; Processing and Analysis of Image Data; Commercial and Noncommercial Image Processing and Computer Vision Software; Image Processing Techniques for the Processing of Fringe Patterns in Optical Metrology; Conclusion; References; Image Correlation Techniques for Microsystems Inspection ; Dietmar Vogel and Bernd Michel ; Introduction; Deformation Measurement by Digital Image Correlation (DIC) Techniques; Base Equipment for DIC Applications; Applications of DIC Techniques to Microsystems; Conclusions and Outlook; References; Light Scattering Techniques for the Inspection of Microcomponents and Microstructures ; Angela Duparré ; Introduction; Theoretical Background of Light Scattering; Measurement Equipment ; Standardization of Light Scattering Methods; Applications for Microcomponent and Microstructure Inspection; Combination of Light Scattering and Profilometric Techniques; Conclusions and Outlook; References; Characterization and Measurement of Microcomponents with the Atomic Force Microscope (AFM) ; F. Michael Serry and Joanna Schmit ; Introduction; Components of AFM and Principles of AFM Operation; AFM Imaging Modes; AFM Nonimaging Modes; Applications of AFM for Microcomponent Inspection: A Case Study; Atomic Force Profilometer (AFP) — A Combination of AFM and Stylus Profiler; Optical Metrology Complementary to AFM; Conclusions and Outlook; References; Optical Profiling Techniques for MEMS Measurement ; Klaus Körner, Aiko Ruprecht, and Tobias Wiesendanger ; Introduction; Principles of Confocal Microscopy; Principle of Microscopic Depth-Scanning Fringe Projection (DSFP); Conclusion; References; Grid and Moiré Methods for Micromeasurements ; Anand Asundi, Bing Zhao, and Huimin Xie ; Introduction; Grid or Grating Fabrication Methods; Micro-Moiré Interferometer; Moiré Methods Using High-Resolution Microscopy; Microscopic Grid Methods; Conclusions; References; Grating Interferometry for In-Plane Displacement and Strain Measurement of Microcomponents ; Leszek Salbut ; Introduction; Principle of Grating Interferometry; Waveguide Grating Interferometry; Measurement System; SG Technology; Exemplary Applications of WGI; Conclusions; References; Interference Microscopy Techniques for Microsystem Characterization ; Alain Bosseboeuf and Sylvain Petitgrand ; Introduction; Interference Microscopes; Modeling of Two-Beam Homodyne Interference Microscopes; Static Measurements by Interference Microscopy; Performance and Issues of Interference Microscopy; Applications of Interferometric Profilometers in the MEMS Field; Dynamic Measurements by Interference Microscopy; Conclusion; Acknowledgments; References; Measuring MEMS in Motion by Laser Doppler Vibrometry ; Christian Rembe, Georg Siegmund, Heinrich Steger, and Michael Wörtge ; Introduction; Laser Doppler Effect and Its Interferometric Detection; Techniques of Laser Doppler Vibrometry; Full-Field Vibrometry; Measuring on Microscopic Structures; Resolution and Accuracy; Combination with Other Techniques; Examples; Conclusion and Outlook; References; An Interferometric Platform for Static, Quasi-Static, and Dynamic Evaluation of Out-Of-Plane Deformations of MEMS and MOEMS ; Christophe Gorecki, Michal Jozwik, and Patrick Delobelle ; Introduction; Interferometric Platform Architecture and Principle of Operation; Optomechanical Characterization of Membranes by “Pointwise” Deflection Method; Mechanical Expertise of Scratch Drive Actuators via Interferometric Measurement of Out-of-Plane Microdisplacements; Dynamic Evaluation of Active MOEMS by Interferometry Using Stroboscopic Technique; General Conclusion and Outlook; Acknowledgments; References; Optoelectronic Holography for Testing Electronic Packaging and MEMS ; Cosme Furlong ; Introduction; Overview of MEMS Fabrication Processes; Optoelectronic Holography; Representative Applications; Summary; Acknowledgments; References; Digital Holography and Its Application in MEMS/MOEMS Inspection ; Wolfgang Osten and Pietro Ferraro ; Introduction; Theory and Basic Principle of Digital Holography (DH); Digital Holographic Interferometry ; Digital Holographic Microscopy (DHM); The Application of DH to the Investigation of Microcomponents; Conclusion; References; Speckle Metrology for Microsystem Inspection ; Roland Höfling and Petra Aswendt ; Introduction; Basics; Applications; Conclusion; References; Spectroscopic Techniques for MEMS Inspection ; Ingrid De Wolf ; Introduction; Raman Spectroscopy (RS); Spectroscopic Ellipsometry (SE); Dual-Beam Spectroscopy (DBS); X-Ray Photoelectron Spectroscopy (XPS); High-Resolution Electron Energy Loss Spectroscopy (HREELS); Auger Electron Spectroscopy (AES); Brillouin Scattering (BS); Conclusions; References; Index
• Publisher Details: Boca Raton, FL : CRC/Taylor & Francis
• Publication Date: 2007
• Copyright Date: 2007
• Extent: 1 online resource (503 pages, [8] pages of plates), illustrations (some color)
• Subjects: 670.42/5; Microelectronics; Optical detectors -- Industrial applications; Quality control -- Optical methods; Engineering Inspection; Optical Measurements; Optical Detectors; Interferometry; Qualité -- Contrôle -- Méthodes optiques; Détecteurs optiques; Microsystèmes électromécaniques; Dispositifs optoélectroniques; Contrôle technique -- Automatisation; TECHNOLOGY & ENGINEERING -- Industrial Engineering; Microelectronics; Optical detectors -- Industrial applications; Quality control -- Optical methods; MEMS; Mikrosystemtechnik; Optische Analyse; Electronic books
• Languages: English
• ISBNs: 0849336821; 9780849336829; 9781420019162; 1420019163
• Notes: Note: Includes bibliographical references and index.
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.