1. Optical inspection of microsystems. (©2007) Other Names: Osten, Wolfgang Record Type: Book Extent: 1 online resource (503 pages, [8] pages of plates), illustrations (some color) View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Biomedical microsystems. ([2011]) Other Names: Meng, Ellis Record Type: Book Extent: 1 online resource (xv, 392 pages), illustrations View Content: Available online (eLD content is only available in our Reading Rooms) ↗
3. Micro mechanical systems : principles and technology /: principles and technology. (1998) Other Names: Fukuda, T (Toshio), 1948-; Menz, W (Wolfgang) Record Type: Book Extent: 1 online resource (276 pages) View Content: Available online (eLD content is only available in our Reading Rooms) ↗