Micro mechanical systems : principles and technology /: principles and technology. (1998)

• Record Type: Book
• Further Information: Note: Edited by T. Fukuda and W. Menz.
• Other Names: Fukuda, T (Toshio), 1948-; Menz, W (Wolfgang)
• Contents: Historical background and parallels to microelectronics -- The motivation for microsystem technology -- Microphysics and design considerations -- From the microcomponent to the microsystem -- Photolithographic microfabrication -- Micromachining by machine tools -- Tribological aspects of microsystems -- Silicon microsensors -- Micro-actuators for micro-robots: electric and magnetic -- Energy source and power supply method -- Control method of micro mechanical systems -- Examples of microsystems -- Future problems.
• Publisher Details: Place of publication not identified : Elsevier Science
• Publication Date: 1998
• Extent: 1 online resource (276 pages)
• Subjects: 621; Microelectromechanical systems -- Handbooks, manuals, etc; Microelectromechanical systems; Tecnologia; Engenharia eletrônica; Microactionneurs; Microtechniques; Micromécanique (ingénierie); Mikromechanik; Mikrosystemtechnik; Mikromechanik; Mikrosystemtechnik; Ebooks -- UML; Handbooks and manuals
• Languages: English
• ISBNs: 9780080536545; 0080536549
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.