Subject: Microelectromechanical systems -- Testing - British Library Electronic Legal Deposit Catalogue-Journal Issues and Articles Search Results

Subject Microelectromechanical systems -- Testing

1. Digital holography for MEMS and microsystem metrology. (2011)

Editors:: Asundi, Anand
Record Type:: Book
Extent:: 1 online resource, illustrations
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗

2. Measurement technology for micro-nanometer devices. (2016)

Authors:: Zhang, Wendong; Chou, Xiujian; Shi, Tielin; Ma, Zongmin; Bao, Haifei; Chen, Jing; Chen, Liguo; Li, Dachao; Xue, Chenyang
Record Type:: Book
Extent:: 1 online resource
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗