Digital holography for MEMS and microsystem metrology. (2011)

• Record Type: Book
• Further Information: Note: Edited by Anand Asundi.
• Editors: Asundi, Anand
• Publisher Details: Chichester, West Sussex : Wiley
• Publication Date: 2011
• Extent: 1 online resource, illustrations
• Subjects: 620.1127; Holographic testing; Microelectromechanical systems -- Testing; Nanostructured materials -- Measurement; TECHNOLOGY & ENGINEERING -- Electronics -- Microelectronics; Technology; Electronic books
• Languages: English
• ISBNs: 9781119972785; 1119972787; 9781119997306; 9781119997290; 9781119972792
• Related ISBNs: 9780470978696
• Notes: Note: Includes bibliographical references and index.
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.