11. DIY MEMS : fabricating microelectromechanical systems in open use labs /: fabricating microelectromechanical systems in open use labs. ([2019]) Authors: Munro, Deborah Record Type: Book Extent: 1 online resource (xvi, 188 pages), illustrations (some color) View Content: Available online (eLD content is only available in our Reading Rooms) ↗
12. FEM and micromechatronics with ATILA software. (2018) Authors: Uchino, Kenji, 1950- Record Type: Book Extent: 1 online resource, illustrations (black and white) View Content: Available online (eLD content is only available in our Reading Rooms) ↗
13. FEM and micromechatronics with ATILA software. (©2008) Other Names: Uchino, Kenji, 1950- Record Type: Book Extent: 1 online resource (xix, 338 pages), illustrations View Content: Available online (eLD content is only available in our Reading Rooms) ↗
14. Foundations of MEMS. ([2012]) Other Names: Ph.D, Liu, Chang; Mungurwadi, Vaishali B; Nandi, Anil V Record Type: Book Extent: 1 online resource, illustrations View Content: Available online (eLD content is only available in our Reading Rooms) ↗
15. Foundations of MEMS. ([2014?]) Authors: Liu, Chang Other Names: Mungurwadi, Vaishali B contributor.; Nandi, Anil V contributor. Record Type: Book Extent: 1 online resource (576 pages), illustrations View Content: Available online (eLD content is only available in our Reading Rooms) ↗
16. Fundamentals of microfabrication and nanotechnology. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology / Volume I, ([2011]) Other Names: Madou, Marc J Record Type: Book Extent: 1 online resource View Content: Available online (eLD content is only available in our Reading Rooms) ↗
17. Handbook of silicon based MEMS : materials & technologies /: materials & technologies. (2015) Editors: Lindroos, Veikko Record Type: Book Extent: 1 online resource View Content: Available online (eLD content is only available in our Reading Rooms) ↗
18. Handbook of silicon based mems materials and technologies. (2020) Editors: Tilli, Markku Record Type: Book Extent: 1 online resource View Content: Available online (eLD content is only available in our Reading Rooms) ↗
19. Integrated microsystems : electronics, photonics, and biotechnology /: electronics, photonics, and biotechnology. ([2016?]) Editors: Iniewski, Krzysztof, 1960- Record Type: Book Extent: 1 online resource, illustrations View Content: Available online (eLD content is only available in our Reading Rooms) ↗
20. Introduction to microfabrication. (2010) Other Names: Franssila, Sami Record Type: Book Extent: 1 online resource (534 pages) View Content: Available online (eLD content is only available in our Reading Rooms) ↗