Foundations of MEMS. ([2014?])
- Record Type:
- Book
- Title:
- Foundations of MEMS. ([2014?])
- Main Title:
- Foundations of MEMS
- Further Information:
- Note: Chang Liu ; international edition contributions by Vaishali B. Mungurwadi, Anil V. Nandi.
- Authors:
- Liu, Chang
- Other Names:
- Mungurwadi, Vaishali B contributor.
Nandi, Anil V contributor. - Contents:
- Preface to Second Edition Preface to First Edition Note to Instructors About the Author Notational Conventions Chapter 1: Introduction 1.0. Preview 1.1. The History of MEMS Development 1.1.1. From the Beginning to 1990 1.1.2. From 1990 to 2001 1.1.3. 2002 to present 1.1.4. Future Trends 1.2. The Intrinsic Characteristics of MEMS 1.2.1. Miniaturization 1.2.2. Microelectronics Integration 1.2.3. Parallel Fabrication with Precision 1.3. Devices: Sensors and Actuators 1.3.1. Energy Domains and Transducers 1.3.2. Sensors Considerations 13.3. Sensor Noise and Design Complexity 1.3.4. Actuators Considerations Summary Problems References Chapter 2: First-Pass Introduction to Microfabrication 2.0. Preview 2.1. Overview of Microfabrication 2.2. Essential Overview of Frequently Used Microfabrication Processes 2.2.1. Photolithography 2.2.2. Thin film deposition 2.2.3. Thermal oxidation of silicon 2.2.4. Wet Etching 2.2.5. Silicon anisotropic etching 2.2.6. Plasma etching and reactive ion etching 2.2.7. Doping 2.2.8. Wafer dicing 2.2.9. Wafer bonding 2.3. The Microelectronics Fabrication Process Flow 2.4. Silicon-based MEMS Processes 2.5. Packaging and Integration 2.5.1. Integration Options 2.5.2. Encapsulation 2.6. New Materials and Fabrication Processes 2.7. Process Selection and Design 2.7.1. Points of Consideration for Deposition Processes 2.7.2. Points of Consideration for Etching Processes 2.7.3. Ideal Rules for Building a Process Flow 2.7.4. Rules for Building a Robust ProcessPreface to Second Edition Preface to First Edition Note to Instructors About the Author Notational Conventions Chapter 1: Introduction 1.0. Preview 1.1. The History of MEMS Development 1.1.1. From the Beginning to 1990 1.1.2. From 1990 to 2001 1.1.3. 2002 to present 1.1.4. Future Trends 1.2. The Intrinsic Characteristics of MEMS 1.2.1. Miniaturization 1.2.2. Microelectronics Integration 1.2.3. Parallel Fabrication with Precision 1.3. Devices: Sensors and Actuators 1.3.1. Energy Domains and Transducers 1.3.2. Sensors Considerations 13.3. Sensor Noise and Design Complexity 1.3.4. Actuators Considerations Summary Problems References Chapter 2: First-Pass Introduction to Microfabrication 2.0. Preview 2.1. Overview of Microfabrication 2.2. Essential Overview of Frequently Used Microfabrication Processes 2.2.1. Photolithography 2.2.2. Thin film deposition 2.2.3. Thermal oxidation of silicon 2.2.4. Wet Etching 2.2.5. Silicon anisotropic etching 2.2.6. Plasma etching and reactive ion etching 2.2.7. Doping 2.2.8. Wafer dicing 2.2.9. Wafer bonding 2.3. The Microelectronics Fabrication Process Flow 2.4. Silicon-based MEMS Processes 2.5. Packaging and Integration 2.5.1. Integration Options 2.5.2. Encapsulation 2.6. New Materials and Fabrication Processes 2.7. Process Selection and Design 2.7.1. Points of Consideration for Deposition Processes 2.7.2. Points of Consideration for Etching Processes 2.7.3. Ideal Rules for Building a Process Flow 2.7.4. Rules for Building a Robust Process Summary Problems References Chapter 3: Review of Essential Electrical and Mechanical Concepts 3.0 Preview 3.1. Conductivity of Semiconductors 3.1.1. Semiconductor Materials 3.1.2. Calculation of Charge Carrier Concentr. … (more)
- Edition:
- Second edition, International edition
- Publisher Details:
- Harlow, England : Pearson
- Publication Date:
- 2014
- Copyright Date:
- 2012
- Extent:
- 1 online resource (576 pages), illustrations
- Subjects:
- 621.3
Microelectromechanical systems
Micro-Electrical-Mechanical Systems
Microsystèmes électromécaniques
Microelectromechanical systems - Languages:
- English
- ISBNs:
- 9780273752240
0273752243
9781292013985
1292013982 - Notes:
- Note: Includes bibliographical references and index.
- Access Rights:
- Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
- Access Usage:
- Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.
- View Content:
- Available online (eLD content is only available in our Reading Rooms) ↗
- Physical Locations:
- British Library HMNTS - ELD.DS.724333
- Ingest File:
- 14_047.xml