Introduction to microfabrication. (2010)

• Record Type: Book
• Further Information: Note: By Sami Franssila.
• Other Names: Franssila, Sami
• Contents: Preface to the First Edition. Preface to the Second Edition. Acknowledgements. 1 Introduction. Characterization. 3 Simulation of Microfabrication Processes. 4 Silicon. 5 Thin-Film Materials and Processes. 6 Epitaxy. 7 Advanced Thin Films. 8 Pattern Generation. 9 Optical Lithography. 10 Advanced Lithography. 11 Etching. 12 Wafer Cleaning and Surface Preparation. 13 Thermal Oxidation. 14 Diffusion. 15 Ion Implantation. 16 CMP: Chemical–Mechanical Polishing. 17 Bonding. 18 Polymer Microprocessing. 19 Glass Microprocessing. 20 Anisotropic Wet Etching. 21 Deep Reactive Ion Etching. 22 Wafer Engineering. 23 Special Processes and Materials. 24 Serial Microprocessing. 25 Process Integration. 26 MOS Transistor Fabrication. 27 Bipolar Transistors. 28 Multilevel Metallization. 29 Surface Micromachining. 30 MEMS Process Integration. 31 Process Equipment. 32 Equipment for Hot Processes. 33 Vacuum and Plasmas. 34 CVD and Epitaxy Equipment. 35 Cleanrooms. 36 Yield and Reliability. 37 Economics of Microfabrication. 38 Moore's Law and Scaling Trends. 39 Microfabrication at Large. Appendix A Properties of Silicon. Appendix B Constants and Conversion Factors. Appendix C Oxide and Nitride Thickness by Color. Index.
• Edition: 2nd ed
• Publisher Details: Place of publication not identified : Wiley
• Publication Date: 2010
• Extent: 1 online resource (534 pages)
• Subjects: 621.381; Microelectromechanical systems; Electronic apparatus and appliances; Microfabrication
• Languages: English
• ISBNs: 9781119991892
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.