1. Biomedical microsystems. ([2011]) Other Names: Meng, Ellis Record Type: Book Extent: 1 online resource (xv, 392 pages), illustrations View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Foundations of MEMS. ([2014?]) Authors: Liu, Chang Other Names: Mungurwadi, Vaishali B contributor.; Nandi, Anil V contributor. Record Type: Book Extent: 1 online resource (576 pages), illustrations View Content: Available online (eLD content is only available in our Reading Rooms) ↗
3. MEMS : fundamental technology and applications /: fundamental technology and applications. (©2013) Other Names: Choudhary, Vikas; Iniewski, Krzysztof, 1960- Record Type: Book Extent: 1 online resource (xxii, 456 pages), illustrations View Content: Available online (eLD content is only available in our Reading Rooms) ↗