MEMS : fundamental technology and applications /: fundamental technology and applications. (©2013)

• Record Type: Book
• Further Information: Note: Edited by Vikas Choudhary, Krzysztof Iniewski.
• Other Names: Choudhary, Vikas; Iniewski, Krzysztof, 1960-
• Contents: Section 1. Breakthrough technology -- section 2. MEMS-based novel applications.
• Publisher Details: Boca Raton : CRC Press
• Publication Date: 2013
• Copyright Date: 2013
• Extent: 1 online resource (xxii, 456 pages), illustrations
• Subjects: 621.381; Microelectromechanical systems; Microelectronic packaging; Micro-Electrical-Mechanical Systems; Biomedical materials; Microelectromechanical systems; MEDICAL -- Biotechnology; TECHNOLOGY & ENGINEERING -- Electronics -- Circuits -- General; TECHNOLOGY & ENGINEERING -- Nanotechnology & MEMS; TECHNOLOGY & ENGINEERING -- Electronics -- Digital; TECHNOLOGY & ENGINEERING -- Electronics -- Microelectronics; Microelectromechanical systems; Microelectronic packaging; Electronic books
• Languages: English
• ISBNs: 1466515821; 9781466515826
• Related ISBNs: 9781466515819; 1466515813
• Notes: Note: Includes bibliographical references.; Note: Print version record.
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.