1. (Invited) Laser Thermal Annealing for Low Thermal Budget Applications: From Contact Formation to Material Modification. (23rd April 2019) Authors: Huet, Karim; Tabata, Toshiyuki; Aubin, Joris; Rozé, Fabien; Thuries, Louis; Halty, Sebastien; Curvers, Benoit; Mazzamuto, Fulvio; Liu, J.; Mori, Yoshihiro Journal: ECS transactions Issue: Volume 89:Number 3(2019) Page Start: 137 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Boosting Ge-Epi P-Well Mobility & Crystal Quality with Si or Sn Implantation and Melt Annealing. (20th July 2018) Authors: Borland, John O; Chaung, Shang-Shuin; Tseng, Tseung-Yuen; Joshi, Abhijeet; Basol, Bulent; Lee, Yao Jen; Kuroi, Takashi; Tabata, Toshiyuki; Huet, Karim; Goodman, Gary; Khapochkina, Nadya; Buyuklimanli, Temel Journal: ECS transactions Issue: Volume 86:Number 7(2018) Page Start: 357 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
3. Dopant Redistribution and Activation in Ga Ion-Implanted High Ge Content SiGe by Explosive Crystallization during UV Nanosecond Pulsed Laser Annealing. (12th February 2021) Authors: Tabata, Toshiyuki; Karim, Huet; Rozé, Fabien; Mazzamuto, Fulvio; Sermage, Bernard; Kopalidis, Petros; Roh, Dwight Journal: ECS journal of solid state science and technology Issue: Volume 10:Number 2(2021) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
4. Doping of semiconductor devices by Laser Thermal Annealing. (May 2017) Authors: Huet, Karim; Mazzamuto, Fulvio; Tabata, Toshiyuki; Toqué-Tresonne, Ines; Mori, Yoshihiro Journal: Materials science in semiconductor processing Issue: Volume 62(2017) Page Start: 92 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
5. Microsecond non-melt UV laser annealing for future 3D-stacked CMOS. (1st June 2022) Authors: Tabata, Toshiyuki; Rozé, Fabien; Thuries, Louis; Halty, Sebastien; Raynal, Pierre-Edouard; Huet, Karim; Mazzamuto, Fulvio; Joshi, Abhijeet; Basol, Bulent M.; Alba, Pablo Acosta; Kerdilès, Sébastien Journal: Applied physics express Issue: Volume 15:Number 6(2022) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
6. Non-doped HfO2 crystallization controlled by dwell time in laser annealing. (12th October 2021) Authors: Tabata, Toshiyuki; Halty, Sebastien; Rozé, Fabien; Huet, Karim; Mazzamuto, Fulvio Journal: Applied physics express Issue: Volume 14:Number 11(2021) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
7. Non-equilibrium engineering of chemically grown SiO2/Si by UV nanosecond pulsed laser annealing from the viewpoint of bias temperature instability sources. (15th December 2020) Authors: Tabata, Toshiyuki; Inoue, Kenji; Yoshida, Yukifumi; Takahashi, Hiroaki Journal: Applied physics express Issue: Volume 14:Number 1(2021) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
8. Non-Equilibrium Growth of Surface Wrinkles Emerging in an SiO2/Si Stack during Si Melting Induced by UV Nanosecond Pulsed Laser Annealing. (1st October 2022) Authors: Karmous, Imen; Rozé, Fabien; Raynal, Pierre-Edouard; Huet, Karim; Alba, Pablo Acosta; Tabata, Toshiyuki; Kerdilès, Sébastien Journal: ECS journal of solid state science and technology Issue: Volume 11:Number 10(2022) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
9. Nucleation and crystal growth in HfO2 thin films by UV nanosecond pulsed laser annealing. (9th December 2019) Authors: Tabata, Toshiyuki Journal: Applied physics express Issue: Volume 13:Number 1(2020) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
10. SiO2-SiO2 die-to-wafer direct bonding interface weakening. (April 2020) Authors: Tabata, Toshiyuki; Sanchez, Loic; Larrey, Vincent; Fournel, Frank; Moriceau, Hubert Journal: Microelectronics and reliability Issue: Volume 107(2020) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗