1. (Invited) Control of Internal Plasma Parameters Toward Atomic Level Processing. (16th August 2016) Authors: Sekine, Makoto; Tsutsumi, T; Fukunaga, Y; Takeda, K; Kondo, H; Ishikawa, K; Hori, M Journal: ECS transactions Issue: Volume 75:Number 6(2016) Page Start: 21 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Adhesion enhancement and amine reduction using film redeposited at the interface of a stack of plasma-enhanced CVD dielectrics for Cu/low-k interconnects. (23rd January 2019) Authors: Miyajima, Hideshi; Watanabe, Kei; Ishikawa, Kenji; Sekine, Makoto; Hori, Masaru Journal: Japanese journal of applied physics Issue: Volume 58:Number 2(2019) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
3. Ar/SF6 plasma simulation for dual-frequency capacitively coupled plasma incorporating gas flow simulation and secondary electron emission. (15th December 2021) Authors: Takagi, Shigeyuki; Kawamura, Suguru; Sekine, Makoto Journal: Japanese journal of applied physics Issue: Volume 61:Number SA(2022) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
4. Behavior of absolute densities of atomic oxygen in the gas phase near an object surface in an AC-excited atmospheric pressure He plasma jet. (21st February 2017) Authors: Takeda, Keigo; Kumakura, Takumi; Ishikawa, Kenji; Tanaka, Hiromasa; Sekine, Makoto; Hori, Masaru Journal: Applied physics express Issue: Volume 10:Number 3(2017) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
5. Characteristics of optical emissions of arc plasma processing for high-rate synthesis of highly crystalline single-walled carbon nanotubes. (3rd February 2017) Authors: Ando, Atsushi; Takeda, Keigo; Ohta, Takayuki; Ito, Masafumi; Hiramatsu, Mineo; Ishikawa, Kenji; Kondo, Hiroki; Sekine, Makoto; Suzuki, Tomoko; Inoue, Sakae; Ando, Yoshinori; Hori, Masaru Journal: Japanese journal of applied physics Issue: Volume 56:Number 3(2017) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
6. Computational study on SiH4 dissociation channels and H abstraction reactions. (22nd June 2016) Authors: Hayashi, Toshio; Ishikawa, Kenji; Sekine, Makoto; Hori, Masaru Journal: Japanese journal of applied physics Issue: Volume 55:Number 7(2016:Jul.)Supplement 2 Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
7. Control of sp2-C cluster incorporation of amorphous carbon films grown by H-radical-injection CH4/H2 plasma-enhanced chemical vapor deposition. (13th February 2019) Authors: Sugiura, Hirotsugu; Jia, Lingyun; Ohashi, Yasuyuki; Kondo, Hiroki; Ishikawa, Kenji; Tsutsumi, Takayoshi; Hayashi, Toshio; Takeda, Keigo; Sekine, Makoto; Hori, Masaru Journal: Japanese journal of applied physics Issue: Volume 58:Number 3(2019) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
8. Cover Picture: Plasma Process. Polym. 6/2019. Issue 6 (30th May 2019) Authors: Zhang, Yan; Ishikawa, Kenji; Mozetič, Miran; Tsutsumi, Takayoshi; Kondo, Hiroki; Sekine, Makoto; Hori, Masaru Journal: Plasma processes and polymers Issue: Volume 16:Issue 6(2019) Page Start: n/a Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
9. Cyclic C4F8 and O2 plasma etching of TiO2 for high-aspect-ratio three-dimensional devices. (12th February 2021) Authors: Imamura, Tsubasa; Sakai, Itsuko; Hayashi, Hisataka; Sekine, Makoto; Hori, Masaru Journal: Japanese journal of applied physics Issue: Volume 60:Number 3(2021) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
10. Dependence of absolute photon flux on infrared absorbance alteration and surface roughness on photoresist polymers irradiated with vacuum ultraviolet photons emitted from HBr plasma. (15th November 2017) Authors: Zhang, Yan; Takeuchi, Takuya; Ishikawa, Kenji; Hayashi, Toshio; Takeda, Keigo; Sekine, Makoto; Hori, Masaru Journal: Japanese journal of applied physics Issue: Volume 56:Number 12(2017) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗