1. (Invited) Challenges on Surface Conditioning in 3D Device Architectures: Triple-Gate FinFETs, Gate-All-Around Lateral and Vertical Nanowire FETs. (15th August 2017) Authors: Veloso, Anabela; Paraschiv, Vasile; Vecchio, Emma; Devriendt, Katia; Li, Waikin; Simoen, Eddy; Chan, B. T.; Tao, Zheng; Rosseel, Erik; Loo, Roger; Milenin, Alexey P.; Kunert, Bernardette; Teugels, Lieve; Sebaai, Farid; Lorant, Christophe; van Dorp, Dennis; Altamirano-Sánchez, Efraín; Brus, Stepha... Journal: ECS transactions Issue: Volume 80:Number 2(2017) Page Start: 3 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. (Invited) Selective Etch of Si and SiGe for Gate All-Around Device Architecture. (11th September 2015) Authors: Wostyn, Kurt; Sebaai, Farid; Rip, Jens; Mertens, Hans; Witters, Liesbeth; Loo, Roger; Hikavyy, Andriy Yakovitch; Milenin, Alexey; Horiguchi, Naoto; Collaert, Nadine; Thean, Aaron; Mertens, Paul W.; De Gendt, Stefan; Holsteyns, Frank Journal: ECS transactions Issue: Volume 69:Number 8(2015) Page Start: 147 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
3. CMOS integration of high-k/metal gate transistors in diffusion and gate replacement (D&GR) scheme for dynamic random access memory peripheral circuits. (16th March 2018) Authors: Litta, Eugenio Dentoni; Ritzenthaler, Romain; Schram, Tom; Spessot, Alessio; O'Sullivan, Barry; Machkaoutsan, Vladimir; Fazan, Pierre; Ji, Yunhyuck; Mannaert, Geert; Lorant, Christophe; Sebaai, Farid; Thiam, Arame; Ercken, Monique; Demuynck, Steven; Horiguchi, Naoto Journal: Japanese journal of applied physics Issue: Volume 57:Number 4(2018)Supplement Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
4. Dissolution of Germanium in Sulfuric Acid Based Solutions. (11th September 2015) Authors: Gan, Nobuko; Ogawa, Yuichi; Nagai, Tatsuo; Masaoka, Toru; Wostyn, Kurt; Sebaai, Farid; Holsteyns, Frank; Mertens, Paul W. Journal: ECS transactions Issue: Volume 69:Number 8(2015) Page Start: 277 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
5. On the Fabrication of Backside Illuminated Image Sensors: Bonding Oxide, Edge Trimming and CMP Rework Routes. (7th April 2015) Authors: Cavaco, Celso; Peng, Lan; Sebaai, Farid; Verbinnen, Greet; Visker, Jakob; Olmen, Jan; Tezcan, Deniz Sabuncuoglu; Osman, Haris Journal: ECS transactions Issue: Volume 64:Number 40(2014) Page Start: 123 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
6. Oxygen Control Challenge for Advanced Wet Processing. (11th September 2015) Authors: Yoshida, Yukifumi; Otsuji, Masayuki; Takahashi, H.; Snow, Jim; Sebaai, Farid; Holsteyns, Frank; Mertens, Paul W.; Sato, Masanobu; Shirakawa, Hajime; Uchida, H. Journal: ECS transactions Issue: Volume 69:Number 8(2015) Page Start: 29 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
7. Replacement fin processing for III–V on Si: From FinFets to nanowires. (January 2016) Authors: Waldron, Niamh; Merckling, Clement; Teugels, Lieve; Ong, Patrick; Sebaai, Farid; Barla, Kathy; Collaert, Nadine; Thean, Voon-Yew (Aaron) Journal: Solid-state electronics Issue: Volume 115 Part B(2016) Page Start: 81 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗