Author/Creator: Rudenko, K.V. - British Library Electronic Legal Deposit Catalogue-Journal Issues and Articles Search Results

Author/Creator Rudenko, K.V.

1. Anisotropic plasma etching of Silicon in gas chopping process by alternating steps of oxidation and etching. (May 2019)

Authors:: Miakonkikh, A.V.; Averkin, S.N.; Rudenko, K.V.
Journal:: Journal of physics
Issue:: Volume 1243(2019)
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Record Type:: Journal Article
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2. Blister suppression in the CO+ molecule implanted SOI substrates with ultrathin buried oxides. (September 2021)

Authors:: Popov, V.P.; Tikhonenko, F.V.; Antonov, V.A.; Tarkov, S.M.; Gutakovskii, A.K.; Vdovin, V.I.; Simakin, S.G.; Rudenko, K.V.
Journal:: Materials today communications
Issue:: Volume 28(2021)
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Record Type:: Journal Article
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3. Ferroelectric properties of SOS and SOI pseudo-MOSFETs with HfO2 interlayers. (September 2019)

Authors:: Popov, V.P.; Antonov, V.A.; Ilnitsky, M.A.; Tyschenko, I.E.; Vdovin, V.I.; Miakonkikh, A.V.; Rudenko, K.V.
Journal:: Solid-state electronics
Issue:: Volume 159(2019)
Page Start:: 63
Record Type:: Journal Article
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4. Hafnia and alumina stacks as UTBOXs in silicon-on insulator. (June 2020)

Authors:: Popov, V.P.; Antonov, V.A.; Gutakovskiy, A.K.; Tyschenko, I.E.; Vdovin, V.I.; Miakonkikh, A.V.; Rudenko, K.V.
Journal:: Solid-state electronics
Issue:: Volume 168(2020)
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Record Type:: Journal Article
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5. Measurement of the gas temperature of neutrals in reactive plasmas by moderate-resolution OES. (May 2019)

Authors:: Miakonkikh, A.V.; Rudenko, K.V.
Journal:: Journal of physics
Issue:: Volume 1243(2019)
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Record Type:: Journal Article
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6. Parallel nanowire sensors with a high-k gate oxide for the sensitive operation in liquids. (August 2022)

Authors:: Popov, V.P.; Tikhonenko, F.V.; Antonov, V.A.; Zarubanov, A.A.; Gluhov, A.V.; Tatarintsev, A.A.; Miakonkikh, A.V.; Rudenko, K.V.
Journal:: Solid-state electronics
Issue:: Volume 194(2022)
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Record Type:: Journal Article
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7. Structure evolution and charge hysteresis in buried Hafnia-Alumina oxides. (August 2022)

Authors:: Popov, V.P.; Tikhonenko, F.V.; Antonov, V.A.; Tolmachev, K.A.; Lomov, A.A.; Miakonkikh, A.V.; Rudenko, K.V.
Journal:: Solid-state electronics
Issue:: Volume 194(2022)
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Record Type:: Journal Article
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