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Author/Creator Robson, Simon G.

2. Deterministic Shallow Dopant Implantation in Silicon with Detection Confidence Upper‐Bound to 99.85% by Ion–Solid Interactions (Adv. Mater. 3/2022). Issue 3 (21st January 2022)

Authors:
Jakob, Alexander M.; Robson, Simon G.; Schmitt, Vivien; Mourik, Vincent; Posselt, Matthias; Spemann, Daniel; Johnson, Brett C.; Firgau, Hannes R.; Mayes, Edwin; McCallum, Jeffrey C.; Morello, Andrea; Jamieson, David N.
Journal:
Advanced materials
Issue:
Volume 34:Issue 3(2022)
Page Start:
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Record Type:
Journal Article
View Content:
Available online (eLD content is only available in our Reading Rooms) ↗

3. Deterministic Shallow Dopant Implantation in Silicon with Detection Confidence Upper‐Bound to 99.85% by Ion–Solid Interactions. Issue 3 (12th November 2021)

Authors:
Jakob, Alexander M.; Robson, Simon G.; Schmitt, Vivien; Mourik, Vincent; Posselt, Matthias; Spemann, Daniel; Johnson, Brett C.; Firgau, Hannes R.; Mayes, Edwin; McCallum, Jeffrey C.; Morello, Andrea; Jamieson, David N.
Journal:
Advanced materials
Issue:
Volume 34:Issue 3(2022)
Page Start:
n/a
Record Type:
Journal Article
View Content:
Available online (eLD content is only available in our Reading Rooms) ↗

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