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Author/Creator Miller, Alfred

1. Near‐Surface Defect Control by Vacancy Injecting/Out‐Diffusing Rapid Thermal Annealing. Issue 17 (5th August 2019)

Authors:
Müller, Timo; Gehmlich, Michael; Sattler, Andreas; Kissinger, Gudrun; Kot, Dawid; Daub, Erich; Miller, Alfred
Other Names:
Kissinger Gudrun guestEditor.; Kot Dawid guestEditor.; Richter Hans guestEditor.; Zöllner Marvin guestEditor.
Journal:
Physica status solidi
Issue:
Volume 216:Issue 17(2019)
Page Start:
n/a
Record Type:
Journal Article
View Content:
Available online (eLD content is only available in our Reading Rooms) ↗

2. Simulation of Nitrogen Indiffusion and Its Impact on Silicon Wafer Strength. Issue 23 (30th July 2021)

Authors:
Müller, Timo; Kissinger, Gudrun; Kot, Dawid; Gehmlich, Michael; Boy, Michael; Vollkopf, Alexander; Sattler, Andreas; Miller, Alfred
Other Names:
Brehm Moritz guestEditor.; Springholz Gunther guestEditor.
Journal:
Physica status solidi
Issue:
Volume 218:Issue 23(2021)
Page Start:
n/a
Record Type:
Journal Article
View Content:
Available online (eLD content is only available in our Reading Rooms) ↗

3. Study on defect annealing potential and bulk micro defect formation using high temperature RTA conditions for Cz‐grown silicon. Issue 7 (21st June 2017)

Authors:
Müller, Timo; Gehmlich, Michael; Kissinger, Gudrun; Kot, Dawid; Sattler, Andreas; Miller, Alfred; Daub, Erich
Other Names:
Mtchedlidze Teimuraz guestEditor.
Journal:
Physica status solidi
Issue:
Volume 14:Issue 7(2017)
Page Start:
n/a
Record Type:
Journal Article
View Content:
Available online (eLD content is only available in our Reading Rooms) ↗

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