1. (Invited) Laser Thermal Annealing for Low Thermal Budget Applications: From Contact Formation to Material Modification. (23rd April 2019) Authors: Huet, Karim; Tabata, Toshiyuki; Aubin, Joris; Rozé, Fabien; Thuries, Louis; Halty, Sebastien; Curvers, Benoit; Mazzamuto, Fulvio; Liu, J.; Mori, Yoshihiro Journal: ECS transactions Issue: Volume 89:Number 3(2019) Page Start: 137 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. (Invited) Sequential 3D Process Integration: Opportunities for Low Temperature Processing. (1st August 2017) Authors: Kerdilès, Sébastien; Acosta-Alba, Pablo; Mathieu, Benoit; Veillerot, Marc; Denis, Hervé; Aussenac, François; Mazzamuto, Fulvio; Toque-Tresonne, Inès; Huet, Karim; Samson, Marie-Pierre; Previtali, Bernard; Brunet, Laurent; Batude, Perrine; Fenouillet-Beranger, Claire Journal: ECS transactions Issue: Volume 80:Number 4(2017) Page Start: 215 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
3. Dopant Redistribution and Activation in Ga Ion-Implanted High Ge Content SiGe by Explosive Crystallization during UV Nanosecond Pulsed Laser Annealing. (12th February 2021) Authors: Tabata, Toshiyuki; Karim, Huet; Rozé, Fabien; Mazzamuto, Fulvio; Sermage, Bernard; Kopalidis, Petros; Roh, Dwight Journal: ECS journal of solid state science and technology Issue: Volume 10:Number 2(2021) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
4. Doping of semiconductor devices by Laser Thermal Annealing. (May 2017) Authors: Huet, Karim; Mazzamuto, Fulvio; Tabata, Toshiyuki; Toqué-Tresonne, Ines; Mori, Yoshihiro Journal: Materials science in semiconductor processing Issue: Volume 62(2017) Page Start: 92 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
5. Microsecond non-melt UV laser annealing for future 3D-stacked CMOS. (1st June 2022) Authors: Tabata, Toshiyuki; Rozé, Fabien; Thuries, Louis; Halty, Sebastien; Raynal, Pierre-Edouard; Huet, Karim; Mazzamuto, Fulvio; Joshi, Abhijeet; Basol, Bulent M.; Alba, Pablo Acosta; Kerdilès, Sébastien Journal: Applied physics express Issue: Volume 15:Number 6(2022) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
6. Non-doped HfO2 crystallization controlled by dwell time in laser annealing. (12th October 2021) Authors: Tabata, Toshiyuki; Halty, Sebastien; Rozé, Fabien; Huet, Karim; Mazzamuto, Fulvio Journal: Applied physics express Issue: Volume 14:Number 11(2021) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
7. Study of Copper Surface Preparation by Sequential Atomic Layer Wet Etching and Laser Annealing Treatments. (15th August 2017) Authors: Iwasaki, Akihisa; Akanishi, Yuya; Mazzamuto, Fulvio; Kesters, Els; Le, Quoc Toan; Holsteyns, Frank Journal: ECS transactions Issue: Volume 80:Number 2(2017) Page Start: 233 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
8. Surface segregated Ga, In, and Al activation in high Ge content SiGe during UV melt laser induced non-equilibrium solidification. (22nd November 2019) Authors: Tabata, Toshiyuki; Huet, Karim; Mazzamuto, Fulvio; La Magna, Antonino Journal: Japanese journal of applied physics Issue: Volume 58:Number 12(2019) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗