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Author/Creator Li, Lingjia

1. 34.4: Applications of Electron Beam Review System for AMOLED Patterning Process Control. (24th February 2021)

Authors:
An, Yongjun; Shao, Shiqi; Zhang, Yongzhi; Guan, Jiangbing; Wu, Nanhui; Liu, Guohua; Li, Aidan; Feng, Yinqiao; Li, Lingjia; Shen, Ricky; Virdi, Kulpreet; Muller, Bernhard; Gao, Yong
Journal:
Digest of technical papers
Issue:
Volume 52(2021)Supplement 1
Page Start:
238
Record Type:
Journal Article
View Content:
Available online (eLD content is only available in our Reading Rooms) ↗

3. 50‐2: Accelerating Advanced Display Fab Yield Ramp with Innovative Autonomous Inline Electron Beam Review System. Issue 1 (30th May 2018)

Authors:
Choi, SoonShin; Zhang, Xuena; Wu, Shengji; Wan, ChangJun; Han, Ben; Liu, Wei; Wu, Gang; Du, Kaiyao; Miao, Sheng; Han, ZhiHui; Lin, DaoBin; Mueller, Bernhard; Li, Lingjia; Meng, Lin; Feng, Yinqiao; Sun, Junyu; Virdi, Kulpreet Singh; Daiker, Volker; Schueler, Bernhard; Trauner, Robert
Journal:
Digest of technical papers
Issue:
Volume 49:Issue 1(2018)
Page Start:
656
Record Type:
Journal Article
View Content:
Available online (eLD content is only available in our Reading Rooms) ↗