1. (Invited) P-Type and N-Type Channeling Ion Implantation of SiC and Implications for Device Design and Fabrication. (8th September 2020) Authors: Das, Hrishikesh; Sunkari, Swapna; Justice, Joshua; Malousek, Roman; Chochol, Jan; Wada, Ryota; Kuroi, Takashi Journal: ECS transactions Issue: Volume 98:Number 6(2020) Page Start: 119 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Boosting Ge-Epi P-Well Mobility & Crystal Quality with Si or Sn Implantation and Melt Annealing. (20th July 2018) Authors: Borland, John O; Chaung, Shang-Shuin; Tseng, Tseung-Yuen; Joshi, Abhijeet; Basol, Bulent; Lee, Yao Jen; Kuroi, Takashi; Tabata, Toshiyuki; Huet, Karim; Goodman, Gary; Khapochkina, Nadya; Buyuklimanli, Temel Journal: ECS transactions Issue: Volume 86:Number 7(2018) Page Start: 357 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
3. Strain evaluation in Ge and Sn implanted Si layers with laser and rapid thermal annealing. (December 2020) Authors: Komago, Shota; Yokogawa, Ryo; Yoshioka, Kazutoshi; Borland, John O.; Kuroi, Takashi; Kawasaki, Yoji; Ogura, Atsushi Journal: Materials science in semiconductor processing Issue: Volume 120(2020) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
4. Strain Evaluation of Laser-Annealed SiGe Thin Layers. (20th July 2018) Authors: Komago, Shota; Murakami, Tatsumi; Yoshioka, Kazutoshi; Yokogawa, Ryo; Borland, John O; Kuroi, Takashi; Tabata, Toshiyuki; Huet, Karim; Horiguchi, Naoto; Ogura, Atsushi Journal: ECS transactions Issue: Volume 86:Number 7(2018) Page Start: 59 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
5. The exceptional advantages of channeling implantation into 4H-SiC to make abrupt deep profiles. (1st May 2022) Authors: Wada, Ryota; Nagayama, Tsutomu; Tokoro, Nobuhiro; Kuroi, Takashi; Das, Hrishikesh; Sunkari, Swapna; Justice, Joshua Journal: Japanese journal of applied physics Issue: Volume 61:Number SC(2022) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗