Search

Search Constraints

You searched for: Author/Creator Koshi, Mitsuo

Search Results

6. Elementary gas‐phase reactions of radical species during chemical vapor deposition of silicon carbide using CH3SiCl3. Issue 5 (11th January 2021)

8. Identifying the mechanism of formation of chlorinated silane polymer by‐products during chemical vapor infiltration of SiC from CH3SiCl3/H2. Issue 5 (13th January 2022)