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Author/Creator Hwang, Su Min

1. A Novel Combinatorial Approach to the Ferroelectric Properties in HfxZr1−xO2 Deposited by Atomic Layer Deposition. Issue 5 (1st April 2021)

Authors:
Jung, Yong Chan; Mohan, Jaidah; Hwang, Su Min; Kim, Jin-Hyun; Le, Dan N.; Sahota, Akshay; Kim, Namhoon; Hernandez-Arriaga, Heber; Veyan, Jean-Francois; Kim, Harrison Sejoon; Kim, Si Joon; Choi, Rino; Kim, Jiyoung
Other Names:
Barabash Sergey V. guestEditor.; Fichtner Simon guestEditor.; Park Min Hyuk guestEditor.; Schenk Tony guestEditor.
Journal:
Physica status solidi
Issue:
Volume 15:Issue 5(2021)
Page Start:
n/a
Record Type:
Journal Article
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2. A Novel Combinatorial Approach to the Ferroelectric Properties in HfxZr1−xO2 Deposited by Atomic Layer Deposition. Issue 5 (1st April 2021)

Authors:
Jung, Yong Chan; Mohan, Jaidah; Hwang, Su Min; Kim, Jin-Hyun; Le, Dan N.; Sahota, Akshay; Kim, Namhoon; Hernandez-Arriaga, Heber; Veyan, Jean-Francois; Kim, Harrison Sejoon; Kim, Si Joon; Choi, Rino; Kim, Jiyoung
Journal:
Physica status solidi
Issue:
Volume 15:Issue 5(2021)
Page Start:
n/a
Record Type:
Journal Article
View Content:
Available online (eLD content is only available in our Reading Rooms) ↗

5. High growth rate and high wet etch resistance silicon nitride grown by low temperature plasma enhanced atomic layer deposition with a novel silylamine precursor. Issue 37 (8th September 2020)

Authors:
Kim, Harrison Sejoon; Hwang, Su Min; Meng, Xin; Byun, Young-Chul; Jung, Yong Chan; Ravichandran, Arul Vigneswar; Sahota, Akshay; Kim, Si Joon; Ahn, Jinho; Lee, Lance; Zhou, Xiaobing; Hwang, Byung Keun; Kim, Jiyoung
Journal:
Journal of materials chemistry
Issue:
Volume 8:Issue 37(2020)
Page Start:
13033
Record Type:
Journal Article
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7. Hollow Cathode Plasma (HCP) Enhanced Atomic Layer Deposition of Silicon Nitride (SiNx) Thin Films Using Pentachlorodisilane (PCDS). (23rd April 2019)

Authors:
Hwang, Su Min; Kondusamy, Aswin L. N.; Qin, Zhiyang; Kim, Harrison Sejoon; Meng, Xin; Kim, Jiyoung; Hwang, Byung Keun; Zhou, Xiaobing; Telgenhoff, Michael; Young, Jeanette
Journal:
ECS transactions
Issue:
Volume 89:Number 3(2019)
Page Start:
63
Record Type:
Journal Article
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