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You searched for: Author/Creator Gao, C.C.Limit your search
- Gao, C.C. [remove] 2
- 620.5 1
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- Electronics -- Periodicals 1
- Microtechnology -- Periodicals 1
- Nanostructures -- Periodicals 1
- Nanotechnology -- Periodicals 1
- highly sensitive seesaw capacitive pressure sensor -- microelectromechanical system -- MEMS -- mechanical deformation -- diaphragm -- silicon on insulator wafer -- Si 1
- silicon -- elemental semiconductors -- silicon‐on‐insulator -- capacitive sensors -- pressure sensors -- microsensors -- deformation -- diaphragms 1
- silicon -- elemental semiconductors -- silicon‐on‐insulator -- pressure sensors -- electrodes -- titanium -- titanium compounds -- platinum -- gold -- ohmic contacts -- thermal stability -- transmission lines -- Auger electron spectra -- measurement errors -- calibration 1
- silicon on insulator pressure sensor -- thermostable electrode -- high temperature applications -- thermal stability -- ohmic contacts -- linear transmission line method -- Auger electron spectroscopy -- calibration -- nonlinearity error -- sensitivity -- pressure 30 kPa to 150 kPa -- temperature 500 degC -- Ti‐TiN‐Pt‐Au -- Si 1