Author/Creator: Decoster, Stefan - British Library Electronic Legal Deposit Catalogue-Journal Issues and Articles Search Results

Author/Creator Decoster, Stefan

1. Development of a Cu and W Compatible PERR Clean in BEOL Advanced Interconnect Patterning. (11th September 2015)

Authors:: Kesters, Els; Le, Quoc Toan; Decoster, Stefan; Vega Gonzalez, Victor; Holsteyns, Frank; De Gendt, Stefan
Journal:: ECS transactions
Issue:: Volume 69:Number 8(2015)
Page Start:: 207
Record Type:: Journal Article
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2. Enhanced Electrical Activation in In-Implanted Si0.35Ge0.65 by C Co-Doping. Issue 1 (2nd January 2017)

Authors:: Feng, Ruixing; Kremer, Felipe; Sprouster, David J.; Mirzaei, Sahar; Decoster, Stefan; Glover, Chris J.; Medling, Scott A.; Hansen, John Lundsgaard; Nylandsted-Larsen, Arne; Russo, Salvy P.; Ridgway, Mark C.
Journal:: Materials research letters
Issue:: Volume 5:Issue 1(2017)
Page Start:: 29
Record Type:: Journal Article
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