1. Removing Organic Residues Using Backside Brush Scrubber Clean. (11th September 2015) Authors: Chauhan, Kripa Nidhan; Sih, Vincent; Bhat, Talapady; Kang, Min Hyo; Kabutoya, Eiji; Cheng, Gordon Journal: ECS transactions Issue: Volume 69:Number 8(2015) Page Start: 109 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Trade-Off between Gate Oxide Integrity and Transistor Performance for FinFET Technology. (1st January 2017) Authors: Lo, Hsien-Ching; Peng, Jianwei; Yong, Chloe; Uppal, Suresh; Qi, Yi; Zhan, Hui; Shen, Yan Ping; Chen, Xiaobo; Yan, Jianghu; Zhu, Baofu; Shintri, Shashidhar; Yamaguchi, Shimpei; Bhat, Talapady; Hong, Wei; Shi, Yong Jun; Regonda, Suresh; Choi, Dongil; Hu, Owen; Joshi, Manoj; Samavedam, Srikanth Journal: ECS journal of solid state science and technology Issue: Volume 6:Number 8(2017) Page Start: N137 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
3. Trade-Off between Gate Oxide Integrity and Transistor Performance for FinFET Technology. (3rd August 2017) Authors: Lo, Hsien-Ching; Peng, Jianwei; Yong, Chloe; Uppal, Suresh; Qi, Yi; Zhan, Hui; Shen, Yan Ping; Chen, Xiaobo; Yan, Jianghu; Zhu, Baofu; Shintri, Shashidhar; Yamaguchi, Shimpei; Bhat, Talapady; Hong, Wei; Shi, Yong Jun; Regonda, Suresh; Choi, Dongil; Hu, Owen; Joshi, Manoj; Samavedam, Srikanth Journal: ECS journal of solid state science and technology Issue: Volume 6:Number 8(2017) Page Start: N137 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗