Removing Organic Residues Using Backside Brush Scrubber Clean. (11th September 2015)
- Record Type:
- Journal Article
- Title:
- Removing Organic Residues Using Backside Brush Scrubber Clean. (11th September 2015)
- Main Title:
- Removing Organic Residues Using Backside Brush Scrubber Clean
- Authors:
- Chauhan, Kripa Nidhan
Sih, Vincent
Bhat, Talapady
Kang, Min Hyo
Kabutoya, Eiji
Cheng, Gordon - Abstract:
- Abstract : In 2X nm devices, high-k metal gate have become an essential part of emerging devices. Wet cleaning plays an important part of advanced semiconductor manufacturing process. As the technology node advances, it has become more and more challenging. Presence of organic residues and cluster of particles on product wafers can cause lot of issues. These clusters of particles and organic residues are found to be die killers and hence, reduce the yield of the product. In this work, we will focus on root cause finding for the organic residue and clusters. The proposed solution demonstrates the improvement of 11X and yield gain of 3.5% as compare to product wafers, and cost savings for HVM (high volume manufacturing).
- Is Part Of:
- ECS transactions. Volume 69:Number 8(2015)
- Journal:
- ECS transactions
- Issue:
- Volume 69:Number 8(2015)
- Issue Display:
- Volume 69, Issue 8 (2015)
- Year:
- 2015
- Volume:
- 69
- Issue:
- 8
- Issue Sort Value:
- 2015-0069-0008-0000
- Page Start:
- 109
- Page End:
- 115
- Publication Date:
- 2015-09-11
- Subjects:
- Electrochemistry -- Periodicals
Electrochemistry
Periodicals
Electronic journals
Electronic journal
541.37 - Journal URLs:
- http://ecsdl.org/ECST/ ↗
http://rzblx1.uni-regensburg.de/ezeit/warpto.phtml?colors=7&jour_id=81944 ↗
https://iopscience.iop.org/journal/1938-5862 ↗
http://www.electrochem.org/ ↗ - DOI:
- 10.1149/06908.0109ecst ↗
- Languages:
- English
- ISSNs:
- 1938-5862
- Deposit Type:
- Legaldeposit
- View Content:
- Available online (eLD content is only available in our Reading Rooms) ↗
- Physical Locations:
- British Library DSC - BLDSS-3PM
British Library HMNTS - ELD Digital store - Ingest File:
- 15664.xml