Author/Creator: Beyer, Gerald - British Library Electronic Legal Deposit Catalogue-Journal Issues and Articles Search Results

Author/Creator Beyer, Gerald

1. Characterization of Silicon Carbon Nitride for Low Temperature Wafer-to-Wafer Direct Bonding. (8th September 2020)

Authors:: Nagano, Fuya; Iacovo, Serena; Phommahaxay, Alain; Inoue, Fumihiro; Sleeckx, Erik; De Gendt, Stefan; Beyer, Gerald; Beyne, Eric
Journal:: ECS transactions
Issue:: Volume 98:Number 4(2020)
Page Start:: 21
Record Type:: Journal Article
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2. Effect of test structure on electromigration characteristics in three-dimensional through silicon via stacked devices. (17th April 2015)

Authors:: Oba, Yoshiyuki; De Messemaeker, Joke; Tyrovouzi, Anna Maria; Miyamori, Yuichi; De Vos, Joeri; Wang, Teng; Beyer, Gerald; Beyne, Eric; De Wolf, Ingrid; Croes, Kristof
Journal:: Japanese journal of applied physics
Issue:: Volume 54:Number 5(2015:May)Supplement
Page Start:
Record Type:: Journal Article
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3. Epitaxial Growth of Active Si on Top of SiGe Etch Stop Layer in View of 3D Device Integration. (8th September 2020)

Authors:: Loo, Roger; Jourdain, Anne; Rengo, Gianluca; Porret, Clement; Hikavyy, Andriy Yakovitch; Liebens, Maarten; Becker, Lucas; Storck, Peter; Beyer, Gerald; Beyne, Eric
Journal:: ECS transactions
Issue:: Volume 98:Number 4(2020)
Page Start:: 157
Record Type:: Journal Article
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4. Influence of Composition of SiCN as Interfacial Layer on Plasma Activated Direct Bonding. (19th June 2019)

Authors:: Inoue, Fumihiro; Peng, Lan; Iacovo, Serena; Phommahaxay, Alain; Verdonck, Patrick; Meersschaut, Johan; Dara, Praveen; Sleeckx, Erik; Miller, Andy; Beyer, Gerald; Beyne, Eric
Journal:: ECS journal of solid state science and technology
Issue:: Volume 8:Number 6(6019)
Page Start:: P346
Record Type:: Journal Article
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5. Influence of Composition of SiCN as Interfacial Layer on Plasma Activated Direct Bonding. (1st January 2019)

Authors:: Inoue, Fumihiro; Peng, Lan; Iacovo, Serena; Phommahaxay, Alain; Verdonck, Patrick; Meersschaut, Johan; Dara, Praveen; Sleeckx, Erik; Miller, Andy; Beyer, Gerald; Beyne, Eric
Journal:: ECS journal of solid state science and technology
Issue:: Volume 8:Number 6(6019)
Page Start:: P346
Record Type:: Journal Article
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗