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APA Citation
Bähr, M., Käpplinger, I., Pobedinskas, P., Frank, T., Grün, A., Haenen, K., & Ortlepp, T. (2023). pressure Sensor Devices Featuring a Chemical Passivation Made of a Locally Synthesized Diamond Layer. Physica status solidi, 220(4), n/a. http://access.bl.uk/ark:/81055/vdc_100179402469.0x00002a