Cite
HARVARD Citation
Bähr, M. et al. (2023). Pressure Sensor Devices Featuring a Chemical Passivation Made of a Locally Synthesized Diamond Layer. Physica status solidi. 220 (4), p. n/a. [Online].
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Bähr, M. et al. (2023). Pressure Sensor Devices Featuring a Chemical Passivation Made of a Locally Synthesized Diamond Layer. Physica status solidi. 220 (4), p. n/a. [Online].